Preparation and Characterization of MOS Device using MgO Film as A Dielectric Material
Preparation and Characterization of MOS Device using MgO Film as A Dielectric Material

Farhan A. Mohamed; Evan T. Salem

Volume 28, Issue 21 , October 2010, , Page 6253-6262

https://doi.org/10.30684/etj.28.21.4

Abstract
  In the present work, fabrication and characterization of Al/MgO/Si MOSdevice has been carried out using PLD as a deposition technique, and forcomparison Al/SiO2/Si MOS device has been ...  Read More ...