Effect on Rapid Thermal Oxidation process on Electrical Properties of Porous Silicon
Effect on Rapid Thermal Oxidation process on Electrical Properties of Porous Silicon

Khawla S. Khashan; Amany A. Awaad; Maysaa A.Mohamed

Volume 27, Issue 4 , March 2009, , Page 663-674

https://doi.org/10.30684/etj.27.4.4

Abstract
  In this work, the porous silicon was prepared by using stain etching in HF-HNO3 atdifferent etching times. Then Rapid Thermal Oxidation (RTO) processes were used forsurface treatment ...  Read More ...