Print ISSN: 1681-6900

Online ISSN: 2412-0758

Author : D. Al-Alagawi, Saria

Optical Method to Determine the Orientation of Monocrystalline Silicon Wafers

Saria D. Al-Alagawi; Manal A. Aboud

Engineering and Technology Journal, 2007, Volume 25, Issue 8, Pages 950-954

In this work, an optical method was used for the determination of the
crystalline orientation of the chemically etched silicon surfaces in the (111),
(110) and (100) planes. This method depends on the light patterns of laser
beam reflected from the monocrystalline surfaces. The optical method submits
acceptable measuring accuracy and well-distinguished folded patterns.