Aluminum Concentration Drives the Structural Evolution of Magnetron Sputtering (Ti, Al) C Thin Film
Aluminum Concentration Drives the Structural Evolution of Magnetron Sputtering (Ti, Al) C Thin Film

A. Al-Ghaban

Volume 36, 1A , January 2018, , Page 70-74

https://doi.org/10.30684/etj.2018.136777

Abstract
  The effect of deposited Al on the structural evolution of TiC films with a chemical composition variation has investigated during combinatorial magnetron sputtering of binary ceramic ...  Read More ...
The Effect of Heat Treatment on Phase Formation of Ti-Al-C thin films
The Effect of Heat Treatment on Phase Formation of Ti-Al-C thin films

Ahmed Mohamed Hasan

Volume 30, Issue 19 , November 2012, , Page 405-419

https://doi.org/10.30684/etj.30.19.15

Abstract
  A variety of different chemical compositions Titanium-Aluminum-Carbon thin films were achieved by combinatorial magnetron sputtering. The as-deposited ternary diagram can be divided ...  Read More ...