Print ISSN: 1681-6900

Online ISSN: 2412-0758

Keywords : TiCx

Aluminum Concentration Drives the Structural Evolution of Magnetron Sputtering (Ti, Al) C Thin Film

A. Al-Ghaban

Engineering and Technology Journal, 2018, Volume 36, Issue 1, Pages 70-74

The effect of deposited Al on the structural evolution of TiC films with a chemical composition variation has investigated during combinatorial magnetron sputtering of binary ceramic (Ti, Al) C. The here produced thin films have been investigated by energy dispersive X-ray spectroscopy (EDX) and X-ray diffraction technique XRD. The structural evolution of combinatorial magnetron sputtered Ti-Al-C system deposited at room temperature fined to be located in the extent of: Ti at.%= 36.74-60.55, Al at.%= 12.05-30.61 and C at.%= 22.53-47.69. XRD results show that films are constituted of mostly cubic (Ti, Al) C phase as well as an X-ray amorphous region in the range of Ti at. %= 37.31-54, Al at. %= 27.67-30.61 and C at. %= 22.53-36.92. A clear evidence for the formation of two different structural regions driving by Al concentration has been observed. X ray analysis also shows that the (111) orientation in the (Ti, Al) C phase is dominant with increasing the Ti concentration.

The Effect of Heat Treatment on Phase Formation of Ti-Al-C thin films

Ahmed Mohamed Hasan

Engineering and Technology Journal, 2012, Volume 30, Issue 19, Pages 405-419

A variety of different chemical compositions Titanium-Aluminum-Carbon thin
films were achieved by combinatorial magnetron sputtering. The as-deposited
ternary diagram can be divided into two regions. The first region consists of
titanium carbide structure with substitutional Aluminum atoms at the Carbon rich
side of the diagram. The second region consists of the amorphous phase at the rest
of the appearing diagram. At 500°C the amorphous phase transforms to titanium
carbide structure with substitutional Aluminum atoms and at 600 and 700°C many
ternary phases have been shown by X-ray diffraction at different regions while the
Carbon rich side sustains the titanium carbide structure with substitutional
Aluminum atoms. This work could be considered as a leading study in the way to
produce the ternary ceramics at temperatures below the conventional ranges in
powder metallurgy as it had been proved earlier by us.