Influence of Shape Design of MEMS (Micro-Cantilever Based Sensor) on High-Sensitivity
Influence of Shape Design of MEMS (Micro-Cantilever Based Sensor) on High-Sensitivity

Ibtissam Mahdi Shihab

Volume 30, Issue 20 , December 2012, , Page 3581-3595

https://doi.org/10.30684/etj.30.20.9

Abstract
  In this paper, a novel analysis was carried out on the biosensor microcantilevers in order to increase the sensitivity of a micro- cantilever based biosensor piezoresistive. Holes were ...  Read More ...