Optical Method to Determine the Orientation of Monocrystalline Silicon Wafers
Optical Method to Determine the Orientation of Monocrystalline Silicon Wafers

Saria D. Al-Alagawi; Manal A. Aboud

Volume 25, Issue 8 , October 2007, , Page 950-954

https://doi.org/10.30684/etj.25.8.3

Abstract
  In this work, an optical method was used for the determination of thecrystalline orientation of the chemically etched silicon surfaces in the (111),(110) and (100) planes. This method ...  Read More ...