Print ISSN: 1681-6900

Online ISSN: 2412-0758

Keywords : cantilevers

Influence of Shape Design of MEMS (Micro-Cantilever Based Sensor) on High-Sensitivity

Ibtissam Mahdi Shihab

Engineering and Technology Journal, 2012, Volume 30, Issue 20, Pages 3581-3595

In this paper, a novel analysis was carried out on the biosensor microcantilevers
in order to increase the sensitivity of a micro- cantilever based
biosensor piezoresistive. Holes were made and compared with the basic
rectangular (R), triangular (T), and step(S) profile cantilever. Effect of changing
the micro-cantilevers profile and its cross-section shape was investigated. A finite
element ANSYS was used to analyze these models. The micro-cantilevers are
made of silicon with elastic modulus 130Gpa and poisson’s ratio 0.28. Several
cases were studied by making one, two and three holes in each biosensor
piezoresistive micro-cantilevers (rectangular (R), triangular (T), and step(S) profile
cantilever). Results showed that triangular micro-cantilever with two holes (T22)
has the better sensitivity, also showed T12 respectively 61.7% and 65% higher
sensitivity than R12, S12.