Engineering and Technology Journal

Keywords = Crystalline orientation

Number of Articles: 1
Optical Method to Determine the Orientation of Monocrystalline Silicon Wafers
Optical Method to Determine the Orientation of Monocrystalline Silicon Wafers

Saria D. Al-Alagawi; Manal A. Aboud

Volume 25, Issue 8 , October 2007, , Page 950-954

Abstract
  In this work, an optical method was used for the determination of the crystalline orientation of the chemically etched silicon surfaces in the (111), (110) and (100) planes. This ...  Read More ...