Cadmium Oxide films have been prepared by vacuum evaporation technique on a glass substrate at room temperature. Structural optical and morphological properties of the films are studied at different oxidation temperatures (573 To 773) K, for the thickness (300) nm at 30 mint. XRD pattern confirm the films shows the polycrystalline nature of the film with preferential orientation along (111) plane. The film deposited with higher oxidation temperatures shows higher transmittance compared to others. Direct energy band gap of CdO thin film increases with increases of oxidation temperature. From AFM measurement, the average grain size is in the range of nanometer and it shows the faceted columnar microstructure of the film is perpendicular to the surface.