Investigation of Laser Assisted Etching for Preparation Silicon Nanostructure and Diagnostic Physical Properties
Engineering and Technology Journal,
2015, Volume 33, Issue 4, Pages 595-601
AbstractIn this paper; nanostructure porous silicon (PS) was prepared by using photo-electrochemical etching (PECE) of n-type silicon at 10 & 30 mA/cm2 etching current density for 10 minute. X-ray diffraction (XRD) confirms the formation of porous silicon and the crystal size is reduced toward nanometric scale. The Atomic Force Microscope (AFM) investigation shows the sponge like structure of PS, the width of surface pits and surface roughness increase with etching current density.Finally, the Fourier Transform Infrared (FTIR) illustrates the PS layer have large amount of dangling bonds.
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