Morphological and Optical Properties of Porous Silicon
Engineering and Technology Journal,
2019, Volume 37, Issue 1B, Pages 17-20
In this work photo-electrochemical etching was used to synthesize uniform and non-uniform macro porous silicon from n-type with orientation (100). Specimens were anodized in a sol of 25% HF: C2H2OH at 1:1 rate. Morphology and porosity of the samples were studied. Optical characteristics (reflection and photoluminescence) of PS samples by changing current density (10, 12, 14 and 16 mA/cm2 ) for fixed etching time (8min) and power density (17mW/cm2 ) by using red laser illumination wavelength (645nm) were investigated. Porous silicon samples imaged via scanning electron microscope (SEM), which showed the topography of silicon surface and pores distribution.
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