Authors

Abstract

The morphological properties of the freshly and oxidized porous silicon at
oxidation time (60, 90) sec were studied. A blue emission from PSi can be seen with
eyes after thermal oxidation because the increasing of energy gab due to decreased
silicon column (nano particles).Pore size and shape of n-type wafers are estimate and
correlated with optical properties before and after rapid thermal oxidation (RTO).

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