Data Acquisition of TiO2 for Optical Material by using Spectroscopic Ellipsometry Technique
Engineering and Technology Journal,
2010, Volume 28, Issue 20, Pages 6128-6139
Abstract
An Ellipsometric experimental set up of SOPRA ES4G type with a powerfulWVASE software for the theoretical calculus of the Ellipsometry parameters. The
Ellipsometry Technique can determine amplitude and phase information Ψ( and Δ)
dependent on wavelength range 250 nm to 900 nm (1.5 - 5 eV), including original
practical solutions, were developed. Encouraging results of TiO2 were obtained in
applying the simple Ellipsometric method of azimuths to determine the optical
constants for TiO2 with this optoelectronic device.
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