Authors
Abstract
In the present work pure and doped ZrO2 with (Al and Co 5wt%) thin film has been deposited on glass and stainless steel 304 substrates by spray pyrolysis technique The film were tested by XRD and the topography of the films has been examined by using SEM. Open porosity, rate of deposition, surface roughness and apparent density was calculated . The results of XRD show that the films was crystalline with tetragonal
phase of ZrO2 .The grain size of pure ZrO2 was (148.6 nm) and lattice strains was 0.27%.Apparent density for pure ZrO2 and with(Al,Co) dopents were (4.5,5 and 5.5 g/cm3) respectively ,and open porosity for the films are respectively(2.5,2 and 1.5 pore/cm2). Surface roughness (Ra) was(0.218μ m) for pure ZrO2 film and(0.904μm) for ZrO2 doped with Al.
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