Author
Abstract
A variety of different chemical compositions Titanium-Aluminum-Carbon thin
films were achieved by combinatorial magnetron sputtering. The as-deposited
ternary diagram can be divided into two regions. The first region consists of
titanium carbide structure with substitutional Aluminum atoms at the Carbon rich
side of the diagram. The second region consists of the amorphous phase at the rest
of the appearing diagram. At 500°C the amorphous phase transforms to titanium
carbide structure with substitutional Aluminum atoms and at 600 and 700°C many
ternary phases have been shown by X-ray diffraction at different regions while the
Carbon rich side sustains the titanium carbide structure with substitutional
Aluminum atoms. This work could be considered as a leading study in the way to
produce the ternary ceramics at temperatures below the conventional ranges in
powder metallurgy as it had been proved earlier by us.
Keywords
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