•  
  •  
 

Keywords

photo-electrochemical etching, porous silicon (PS), SEM, PL, Reflection

Document Type

Research Paper

Abstract

In this work photo-electrochemical etching was used to synthesize uniform and non-uniform macro porous silicon from n-type with orientation (100). Specimens were anodized in a sol of 25% HF: C2H2OH at 1:1 rate. Morphology and porosity of the samples were studied. Optical characteristics (reflection and photoluminescence) of PS samples by changing current density (10, 12, 14 and 16 mA/cm2 ) for fixed etching time (8min) and power density (17mW/cm2 ) by using red laser illumination wavelength (645nm) were investigated. Porous silicon samples imaged via scanning electron microscope (SEM), which showed the topography of silicon surface and pores distribution.

DOI

10.30684/etj.37.1B.3

First Page

17

Last Page

20

Share

COinS